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Multiobjective Optimization of Deflection and Curvature Radius in a Microelectromechanical System (MEMS) Bimorph Cantilever Actuator Driven by Shape Memory Alloy (SMA) Thin-Film Phase Change.
| 题名： | Multiobjective Optimization of Deflection and Curvature Radius in a Microelectromechanical System (MEMS) Bimorph Cantilever Actuator Driven by Shape Memory Alloy (SMA) Thin-Film Phase Change. |
| 作者： | Knick, C. R.; Zhou, H.; Kumar, G.; Monaghan, P. |
| 关键词： | Shape memory alloys, Microelectromechanical systems, Optimization, Phase change materials, Robotics, Thin films, Actuators, Titanium alloys, Nickel alloys, Elastic properties, Modulus of elasticity, Thickness, Deflection, Micromechanics, Curvature, Shape memory alloy, Microactuators, Optimization, Mems(microelectromechanical system), Curvature radius |
| 摘要： | At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape-memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy (NiTi) were identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers. |
| 报告类型： | 科技报告 |
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